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发明名称
ION SOURCE WITH MULTI-PIECE OUTER CATHODE
摘要
申请公布号
EP1894221(B1)
申请公布日期
2012.06.13
申请号
EP20060758543
申请日期
2006.04.25
申请人
GUARDIAN INDUSTRIES CORP.
发明人
WALTON, HUGH, A.
分类号
H01J27/02;H01J37/08
主分类号
H01J27/02
代理机构
代理人
主权项
地址
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