发明名称 APPARATUS FOR MANUFACTURING POLY-SILICON THIN FILM
摘要 Provided is an apparatus for supplying an electric field, comprising: a power supply unit including an electrode terminal for supplying power to a conductive layer; and a pad unit which is spaced apart from the electrode terminal, and which includes n (where n is an integer greater than 2) conductive pads, wherein the pad unit is rotatable about a rotational axis, which is an imaginary straight line parallel to the lengthwise direction of the electrode terminal.
申请公布号 KR101155605(B1) 申请公布日期 2012.06.13
申请号 KR20100096860 申请日期 2010.10.05
申请人 发明人
分类号 H01L21/324;H01L29/786 主分类号 H01L21/324
代理机构 代理人
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