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发明名称
SUPPORT BODY AND SUBSTRATE STORAGE CONTAINER
摘要
申请公布号
EP2306504(A4)
申请公布日期
2012.06.13
申请号
EP20090770031
申请日期
2009.06.12
申请人
SHIN-ETSU POLYMER CO. LTD.
发明人
OHNUKI, KAZUMASA;SHIDA, HIROYUKI;ODASHIMA, SATOSHI
分类号
H01L21/673
主分类号
H01L21/673
代理机构
代理人
主权项
地址
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