Surface profile inspection device

摘要

A surface profile inspection device producing a sheet of light propagating in a linear region forming a plane from a laser beam emitted from a laser light source (LD) and irradiating the sheet of light to an object to be measured, and including an image capturing means (20) capturing an image of the object to be measured and a configuration data generating means(40) extracting a light section line defined by an irradiation of the sheet of light from image data of the captured image and generating surface profile data of the object to be measured. The laser light source (LD) includes a semiconductor laser (LD) emitting a laser beam from a light emitting layer (17) formed in a linear direction (M) along a boarder of a p-n junction. An attitude of the semiconductor laser (LD) is set to arrange the linear direction (M) to be unparallel to a spread direction of the sheet of light.