MEMS MICROPHONE

摘要

PURPOSE: A MEMS(Micro-Electro-Mechanical Systems) microphone is provided to improve frequency response characteristics by eliminating attenuation due to air focused on a central portion of a vibration plate through a center exhaust hole formed on the vibration plate of a capacitance type MEMS microphone. CONSTITUTION: A capacitance type MEMS(Micro-Electro-Mechanical Systems) microphone includes a substrate(211) and an acoustic chamber(212) formed through the processing of the substrate. The capacitance type MEMS microphone includes a bottom electrode(221) formed on the acoustic chamber and an exhaust hole(222) formed in the bottom electrode into a predetermined constant pattern. The capacitance type MEMS microphone includes an bottom electrode support supporting the bottom electrode and a vibration plate(231) forming an air layer while being spaced from the bottom electrode at a constant interval. The capacitance type MEMS microphone includes a vibration plate support stand(233) attaching the vibration plate to the substrate and a vibration plate exhaust hole(232) formed in the center of the vibration plate.