VERTICAL HEAT TREATMENT APPARATUS

摘要

PURPOSE: A vertical heat treatment apparatus is provided to improve quality of a thin film formed on a substrate by preventing a thermal decomposition process of gas which is provided for a substrate treatment process inside a nozzle before reaching to a substrate. CONSTITUTION: A process tube(100) stores a boat in which a plurality of substrates is accepted. A heater assembly(500) is installed by covering the process tube. A first nozzle(300) installed inside the process tube has a nozzle for spraying gas. The first nozzles are installed on the process tube by penetrating the heater assembly. The first nozzles have the same retention distance in order to reduce thermal effects of the heater assembly to the gas.