| 摘要 |
<p>PURPOSE: A patterning device supporter is provided to prevent a patterning device from sliding by using a control unit and the minimum weight under high acceleration. CONSTITUTION: A transfer device(230) transfers a support device(250). The support device supports a patterning device(270). A magnetostrictive actuator(260) applies forces to the patterning device in an acceleration section of a scanning operation profile. A holding device(280) holds the patterning device. A shearing force is generated between the patterning device and the support device.</p> |
