SAMPLE TABLE AND MICROWAVE PLASMA PROCESSING APPARATUS,申请号KR20127010099-传众专利搜索

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发明名称	SAMPLE TABLE AND MICROWAVE PLASMA PROCESSING APPARATUS
摘要
申请公布号	KR20120060889(A)	申请公布日期	2012.06.12
申请号	KR20127010099	申请日期	2010.09.29
申请人	TOKYO ELECTRON LIMITED	发明人	YOSHIKAWA WATARU;MOYAMA KAZUKI;OKAYAMA NOBUYUKI;SUDOU KENJI;OTSUKA YASUHIRO
分类号	H01L21/3065;H01L21/683	主分类号	H01L21/3065
代理机构		代理人
主权项
地址

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