发明名称 Production apparatus and method of producing a light-emitting device by using the same apparatus
摘要 The present invention relates to a method for manufacturing a light-emitting device. At least one of a light-emitting film forming step, a conductive film forming step and an insulating film forming step is carried out while holding a substrate in a manner that an angle subtended by a surface of the substrate and the direction of gravity is within a range of from 0 to 30°.
申请公布号 US8197295(B2) 申请公布日期 2012.06.12
申请号 US201113083098 申请日期 2011.04.08
申请人 YAMAZAKI SHUNPEI;HAMADA TAKASHI;SEO SATOSHI;SEMICONDUCTOR ENERGY LABORATORY CO., LTD. 发明人 YAMAZAKI SHUNPEI;HAMADA TAKASHI;SEO SATOSHI
分类号 H01J9/00;H05B33/10;B05C5/00;B05D1/02;B05D3/00;B41J2/01;H01L21/00;H01L31/10;H01L51/00;H01L51/56 主分类号 H01J9/00
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