发明名称 |
Production apparatus and method of producing a light-emitting device by using the same apparatus |
摘要 |
The present invention relates to a method for manufacturing a light-emitting device. At least one of a light-emitting film forming step, a conductive film forming step and an insulating film forming step is carried out while holding a substrate in a manner that an angle subtended by a surface of the substrate and the direction of gravity is within a range of from 0 to 30°. |
申请公布号 |
US8197295(B2) |
申请公布日期 |
2012.06.12 |
申请号 |
US201113083098 |
申请日期 |
2011.04.08 |
申请人 |
YAMAZAKI SHUNPEI;HAMADA TAKASHI;SEO SATOSHI;SEMICONDUCTOR ENERGY LABORATORY CO., LTD. |
发明人 |
YAMAZAKI SHUNPEI;HAMADA TAKASHI;SEO SATOSHI |
分类号 |
H01J9/00;H05B33/10;B05C5/00;B05D1/02;B05D3/00;B41J2/01;H01L21/00;H01L31/10;H01L51/00;H01L51/56 |
主分类号 |
H01J9/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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