Microfabricated RF capacitor

摘要

The present invention is directed to a microfabricated RF capacitor. The capacitor includes two signal wirebond pads configured for being connected to an electrical current source. The capacitor further includes two backbone structures which are connected to the wirebond pads and receive electrical current from the electrical current source via the wirebond pads, each backbone structure including a first backbone portion and a second backbone portion. The capacitor further includes a plurality of protrusions which are connected to the backbone portions of the backbone structures. The protrusions are spaced apart from each other and parallel to each other. Further, the protrusions are configured for distributing current received by the backbone structures and for promoting structural stability of the capacitor. The capacitor further includes a ground wall structure which may be configured for receiving ground current from a ground current source.