发明名称 Piezoelectric actuator with encapsulation layer having a thickness-varying property gradient
摘要 In a method for the production of a gradient encapsulation layer 20 on a piezoelectric actuator 1, based on this gradient encapsulation layer 20, the piezoelectric actuator 1 does not 5 require an additional housing-like enveloping structure in order to be protected externally. The gradient encapsulation layer 20 is produced by cold gas spraying of particles having different material properties.
申请公布号 US8198783(B2) 申请公布日期 2012.06.12
申请号 US20070298116 申请日期 2007.04.24
申请人 BAYER HEINER;FREUDENBERG HELLMUT;GANSTER AXEL;HAMANN CHRISTOPH;HENNING OLIVER;JENSEN JENS DAHL;LUGERT GUENTER;MOCK RANDOLF;SCHUH CARSTEN;SIEMENS AKTIENGESELLSCHAFT 发明人 BAYER HEINER;FREUDENBERG HELLMUT;GANSTER AXEL;HAMANN CHRISTOPH;HENNING OLIVER;JENSEN JENS DAHL;LUGERT GUENTER;MOCK RANDOLF;SCHUH CARSTEN
分类号 H01L41/08;H01L41/047;H01L41/22;H01L41/23 主分类号 H01L41/08
代理机构 代理人
主权项
地址