发明名称 |
Piezoelectric actuator with encapsulation layer having a thickness-varying property gradient |
摘要 |
In a method for the production of a gradient encapsulation layer 20 on a piezoelectric actuator 1, based on this gradient encapsulation layer 20, the piezoelectric actuator 1 does not 5 require an additional housing-like enveloping structure in order to be protected externally. The gradient encapsulation layer 20 is produced by cold gas spraying of particles having different material properties.
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申请公布号 |
US8198783(B2) |
申请公布日期 |
2012.06.12 |
申请号 |
US20070298116 |
申请日期 |
2007.04.24 |
申请人 |
BAYER HEINER;FREUDENBERG HELLMUT;GANSTER AXEL;HAMANN CHRISTOPH;HENNING OLIVER;JENSEN JENS DAHL;LUGERT GUENTER;MOCK RANDOLF;SCHUH CARSTEN;SIEMENS AKTIENGESELLSCHAFT |
发明人 |
BAYER HEINER;FREUDENBERG HELLMUT;GANSTER AXEL;HAMANN CHRISTOPH;HENNING OLIVER;JENSEN JENS DAHL;LUGERT GUENTER;MOCK RANDOLF;SCHUH CARSTEN |
分类号 |
H01L41/08;H01L41/047;H01L41/22;H01L41/23 |
主分类号 |
H01L41/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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