发明名称 |
Vibrator element, sensor device, sensor, and electronic apparatus |
摘要 |
A vibrator element includes: a base part; and a vibrating arm extended from the base part in a first direction, the vibrating arm including a first region, a second region, and a third region sequentially arranged from the base part side in the first direction, the first region to the third region including first electrodes and second electrodes that generate electric fields in second directions perpendicular to the first direction in a plan view and are electrically independent from each other, wherein electric field directions of the first region and the third region and an electric field direction of the second region are opposite to each other, and the vibrating arm is expanded and contracted in the first direction by the electric fields in the second directions, and the vibrating arm is vibrated in third directions as directions perpendicular to the respective first direction and second directions. |
申请公布号 |
US8198948(B2) |
申请公布日期 |
2012.06.12 |
申请号 |
US201113044012 |
申请日期 |
2011.03.09 |
申请人 |
NISHIZAWA RYUTA;ICHIKAWA SO;SEIKO EPSON CORPORATION |
发明人 |
NISHIZAWA RYUTA;ICHIKAWA SO |
分类号 |
H01L41/00;H03B5/30;H03B5/32 |
主分类号 |
H01L41/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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