Device for Selective Micro-Pattern Forming Using Ultrasonic Wave and Method Performed by the Same Deltrasonic Wave and Method Performed by the Same Device

摘要

PURPOSE: A selective fine pattern molding apparatus which uses ultrasonic waves and a method thereof are provided to reduce costs required for forming various fine pattern shapes by enabling replacement of a masking layer without reprocessing a mold or a tool horn. CONSTITUTION: A mold(20) fixes a processed substrate(10). A second pattern(220) is formed on a region of the mold corresponding to a predetermined region. The processed substrate is fixed on the mold by a fixing device(50). A masking layer(30) is comprised of a masking region(35) and a non-masking region(37). A tool horn(40) transfers ultrasonic vibrations to the masking layer.