发明名称 ELECTRO-ACOUSTIC TRANSDUCER COMPRISING A MEMS SENSOR
摘要 An electro-acoustic transducer (1) is disclosed, comprising a substrate (2) that comprises conducting paths (3), a cover (4) attached to said substrate (2) thus forming an inner chamber (A) and a space (B) outside said chamber (A), wherein said cover (4) comprises one or more ports (5). A MEMS sensor (6) of said transducer (1) has at least one hole (7) extending from a first side (C) to a second side (D). A membrane (8) is arranged in said hole (7) transverse to the hole axis (E) thus forming a first hole space (a) and a second hole space (b). The sensor (6) furthermore has electrical connectors (9) designed to carry electrical signals representing sound acting on said membrane (8), which connectors (9) are connected to said conducting paths (3). According to the invention, said MEMS sensor (6) is arranged inside said chamber (A) in such a way that said second hole space (b) is connected to said outside space (B) via said port or ports (5) and said first hole space (a) is connected to said inner chamber (A).
申请公布号 KR101152071(B1) 申请公布日期 2012.06.11
申请号 KR20107004633 申请日期 2008.07.29
申请人 发明人
分类号 H04R19/00;H04R19/04 主分类号 H04R19/00
代理机构 代理人
主权项
地址