Dielectric Barrier Discharge Apparatus

摘要

PURPOSE: A dielectric barrier discharge apparatus is provided to prevent the same surface from being repetitively processed by forming cross points of a plurality of linear electrodes from being put on the same line. CONSTITUTION: An electrode is composed of two or more lines(40). The electrode is formed to be crossed with a counter electrode to have a cross point(30). A processed object is processed by discharge plasma between dielectric barriers. The electrode is located to be spaced from the dielectric barrier at a certain distance. The electrode is installed so that cross points of a plurality of linear electrodes are not put on the same line. The electrode prevents duplication processing of the same surface when the processing object is transferred. The cross points are formed into a lattice type according to the condition of equation.