DEVICE AND SYSTEM FOR ALIGNING SUBSTRATE, AND A COATING APPARATUS HAVING THE SAME

摘要

PURPOSE: An aligning apparatus and system of a substrate and a coating apparatus including the same are provided to align substrates of various sizes by changeably adjusting a stroke of the aligning apparatus by a user. CONSTITUTION: A vision camera checks an align state of a substrate. A controller is respectively connected to the vision camera and a pair of aligning apparatuses. A display apparatus is connected to the controller and monitors the align state of the substrate. An upper side block(252) is located on a support block. A roller(253) is offered to a tip-end part of the upper side block. An up-down cylinder controls up-down movement of the upper side block. A servo motor(256) controls forward-backward movement of the upper side block. The upper side block linearly moves to a variable stroke within a maximum stroke by the servo motor. The maximum stroke is 30mm.