Method for producing a TiO2 array using ZnO template

摘要

PURPOSE: A method for forming a TiO2 array is provided to reduce process costs by using a nano-imprint mode and an electronic beam lithography method and to reduce the size of a nano pattern. CONSTITUTION: Polymer nano patterns are formed on a substrate(2). Monomer mono-layers are formed between the polymer nano patterns at the substrate. A seed layer is formed between the monomer mono-layers at the substrate. A ZnO(Zinc Oxide)(7) is grown up on the seed layer and a ZnO template is formed. The polymer nano patterns are formed by using a nano-imprint mode. A titanium dioxide is formed on the ZnO surface of the ZnO template and the ZnO is eliminated.