| 摘要 |
<P>PROBLEM TO BE SOLVED: To suppress errors of interference measurement length due to temperature changes of mounted components and improve the positioning accuracy of a stage. <P>SOLUTION: A stage device includes a stage movable part moving on a surface plate in a non contact manner, an interferometer measuring a position of the stage movable part, and a pipeline or electric wiring connecting with the stage movable part. The stage device further includes an auxiliary member holding the pipeline or the electric wiring taken out to the exterior of the stage movable part, an envelop member covering the auxiliary member, exhaust means exhausting an interior space of the envelop member, and a heat recovery unit disposed so as to reduce heat transmitted from the pipeline or the electric wiring to a space in which measurement light of the interferometer passes. <P>COPYRIGHT: (C)2012,JPO&INPIT |
