| 摘要 |
<P>PROBLEM TO BE SOLVED: To scan illumination light two-dimensionally without changing the capability of focusing illumination light on a specimen. <P>SOLUTION: A microscope apparatus 1 comprises: a spatial optical modulation element 4 which modulates the wavefront of illumination light from a light source 2; a scanner 5 which has two mirrors 5a and 5b independently pivoted about two non-parallel axes S1 and S2 and two-dimensionally scans the illumination light; a relay optical system 6 which relays an image in the scanner 5 to a pupil position of an objective optical system 7; and a beam-shift mechanisms 6a and 8 which move rays L of the illumination light in a direction crossing an optical axis between the spatial optical modulation element 4 and the objective optical system 7 in response to pivoting of the mirrors 5a and 5b. The beam-shift mechanisms 6a and 8 move the rays L such that the image at the pupil position of the objective optical system 7, when assuming that the mirrors 5a and 5b are stationary, is moved in the direction opposite to the direction in which the image relayed to the pupil position of the objective optical system 7 by the relay optical system 6, when assuming that the mirrors 5a and 5b are pivoted with the rays fixed, is moved. <P>COPYRIGHT: (C)2012,JPO&INPIT |
