METHOD OF MANUFACTURING GRANULATED SILICA POWDER, METHOD OF MANUFACTURING VITREOUS SILICA CRUCIBLE

摘要

The present invention provides a method of manufacturing a vitreous silica crucible having a transparent layer by use of waste vitreous silica, and silica powder suitable for the manufacturing. According to the present invention, there is provided a method of manufacturing granulated silica powder comprising a process for pulverizing waste vitreous silica generated in the manufacturing process of a crucible to form silica fine powder having an average particle diameter of 100μm or less, and a process for granulating the silica fine powder to obtain granulated silica powder having an average particle diameter of 50μm or more under helium atmosphere.