| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method of producing a piezoelectric film which allows for production of a piezoelectric film having a large amount of strain. <P>SOLUTION: The method of producing a piezoelectric film includes a step for forming a piezoelectric precursor film by a composition for forming a piezoelectric film which contains Bi, Fe, Mn, Ba and Ti where the Bi/(Fe+Mn), i.e. the mole ratio of Bi and the total amount of Fe and Mn, is 1.02-1.08, and a step for crystallizing the piezoelectric precursor film by heating. <P>COPYRIGHT: (C)2012,JPO&INPIT |
