GAP TUNING FOR SURFACE MICROMACHINED STRUCTURE IN EPITAXIAL REACTOR

摘要

PROBLEM TO BE SOLVED: To provide a method for tuning a gap between a plurality of surfaces of at least one micromechanical element on a device.

SOLUTION: The method includes: etching a contour of the at least one micromechanical element in a top layer of the device so that the contour defines at least two opposing surfaces of the plurality of surfaces of the at least one micromechanical element; and depositing a gap narrowing layer on the at least two opposing surfaces of the plurality of surfaces in an epitaxial reactor so that the gap between the at least two opposing surfaces of the plurality of surfaces can be narrowed by the gap narrowing layer.

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