| 发明名称 |
DIAMOND-LIKE THIN FILM, AND METHOD AND APPARATUS FOR PRODUCING THE SAME |
| 摘要 |
<P>PROBLEM TO BE SOLVED: To easily obtain a diamond-like thin film having improved properties without impairing properties of the film. <P>SOLUTION: The diamond-like thin film includes: a first layer 13 which is formed on a base material 11 and composed of a diamond-like material containing hydrogen bonded to carbon; a second layer 14 which is formed on the first layer 13 and in which at least a portion of hydrogen bonded to carbon is abstracted and which is composed of a diamond-like material in which the content rate of hydrogen is low in comparison with that of the first layer 13; and a third layer 15 which is formed between the first layer 13 and the base material 11 and composed of a diamond-like material in which the content rate of hydrogen is low in comparison with that of the first layer 13. <P>COPYRIGHT: (C)2012,JPO&INPIT |
| 申请公布号 |
JP2012107344(A) |
申请公布日期 |
2012.06.07 |
| 申请号 |
JP20120050239 |
申请日期 |
2012.03.07 |
| 申请人 |
NAGASAKI UNIV;TOYO ADVANCED TECHNOLOGIES CO LTD |
发明人 |
SHINOHARA MASANORI;MATSUDA YOSHINOBU;FUJIYAMA HIROSHI;NAKATANI TATSUYUKI;OKAMOTO KEIJI |
| 分类号 |
C23C16/27;C01B31/02;C23C16/56 |
主分类号 |
C23C16/27 |
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