| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for manufacturing a zinc oxide cylinder target, whereby the thermally sprayed zinc oxide cylinder target can be processed and finished without staining its structure. <P>SOLUTION: The method for manufacturing the zinc oxide cylinder target comprises: forming a zinc oxide target layer by thermally spraying a zinc oxide powder onto an outer peripheral surface of a backing tube; and performing dry cutting of the zinc oxide target layer so as to process the thermally sprayed zinc oxide cylinder target without staining its structure. <P>COPYRIGHT: (C)2012,JPO&INPIT |
