| 发明名称 |
PROCESS TOOL CHEMICAL AND GAS USAGE OPTIMIZATION |
| 摘要 |
A resource usage optimization server determines a degradation caused by a first resource. The resource usage optimization server determines a cleaning caused by a second resource. The resource usage optimization server calculates a ratio of the degradation and the cleaning.
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| 申请公布号 |
US2012143574(A1) |
申请公布日期 |
2012.06.07 |
| 申请号 |
US201113308124 |
申请日期 |
2011.11.30 |
| 申请人 |
VEPA KRISHNA;HAWKINS PARRIS C.M.;NEUBER ANDREAS |
发明人 |
VEPA KRISHNA;HAWKINS PARRIS C.M.;NEUBER ANDREAS |
| 分类号 |
G06F17/10 |
主分类号 |
G06F17/10 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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