| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an interference filter, an optical module and an optical analysis device which can increase the resolution in a long wavelength region. <P>SOLUTION: An interference filter includes a fixed mirror 54 and a movable mirror 55 disposed facing the fixed mirror 54 through a gap G. The fixed mirror 54 is formed by laminating one layer of TiO<SB POS="POST">2</SB>film 57 and one layer of Ag alloy film 58. The movable mirror 55 is formed by laminating one layer of the TiO<SB POS="POST">2</SB>film 57 and one layer of the Ag alloy film 58. <P>COPYRIGHT: (C)2012,JPO&INPIT |
