摘要 |
<P>PROBLEM TO BE SOLVED: To obtain a small-sized piezoelectric vibrator which is strong to impact of falling and the like. <P>SOLUTION: A piezoelectric vibrator 1 comprises a piezoelectric vibration element 4, and a package for storing the piezoelectric vibration element 4. The piezoelectric vibration element 4 comprises a piezoelectric substrate 4a equipped with a plurality of vibration arms 9a and 9b, a base portion 5 connecting those, and weight portions 9a and 9b provided at the other end of the vibration arms 9a and 9b; and excitation electrodes formed on front and back surfaces of each vibration arm. The package comprises an insulation substrate 11 equipped with an element loading pad 18, and a mounting terminal 16; and a cover body 35 for hermetically sealing. On the upper surface of the insulation substrate 11, a cushioning material 24 made by metal or high polymers is formed at parts opposite to tip portions of the weight portions 9a and 9b and the base portion 5 of the piezoelectric vibration element 4. <P>COPYRIGHT: (C)2012,JPO&INPIT |