发明名称 PIEZOELECTRIC VIBRATOR, VIBRATION GYRO SENSOR AND MANUFACTURING METHOD OF THE SAME
摘要 <P>PROBLEM TO BE SOLVED: To obtain a small-sized piezoelectric vibrator which is strong to impact of falling and the like. <P>SOLUTION: A piezoelectric vibrator 1 comprises a piezoelectric vibration element 4, and a package for storing the piezoelectric vibration element 4. The piezoelectric vibration element 4 comprises a piezoelectric substrate 4a equipped with a plurality of vibration arms 9a and 9b, a base portion 5 connecting those, and weight portions 9a and 9b provided at the other end of the vibration arms 9a and 9b; and excitation electrodes formed on front and back surfaces of each vibration arm. The package comprises an insulation substrate 11 equipped with an element loading pad 18, and a mounting terminal 16; and a cover body 35 for hermetically sealing. On the upper surface of the insulation substrate 11, a cushioning material 24 made by metal or high polymers is formed at parts opposite to tip portions of the weight portions 9a and 9b and the base portion 5 of the piezoelectric vibration element 4. <P>COPYRIGHT: (C)2012,JPO&INPIT
申请公布号 JP2012107968(A) 申请公布日期 2012.06.07
申请号 JP20100256542 申请日期 2010.11.17
申请人 SEIKO EPSON CORP 发明人 MIKAMI MASARU
分类号 G01C19/56;G01C19/5628;H01L41/08;H01L41/09;H01L41/18;H01L41/22;H01L41/23;H01L41/313;H03H3/02;H03H9/10;H03H9/19;H03H9/215 主分类号 G01C19/56
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