| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for producing carbon nanotubes to obtain high quality carbon nanotubes. <P>SOLUTION: Substrates 9 and 15 are placed inside processing chambers 2 and 12 of antenna type plasma CVDs 1 and 11, and carbon nanotubes are formed on the substrates 9 and 15 when the inside of the processing chambers 2 and 12 is decompressed to a predetermined pressure under the flow of a material gas and plasma is produced from the end 6a of an antenna 6. The substrates 9 and 15 are kept at a temperature range of 600-800°C, and plasma is produced in the antenna 6 by applying electric power in the range of 60-180W. The substrates 9 and 15 are held so that a distance d from the end 6a of the antenna 6 is within the distance range of 62.5-82.5 mm. <P>COPYRIGHT: (C)2012,JPO&INPIT |
