DEFECT INSPECTION METHOD AND DEFECT INSPECTION DEVICE

摘要

Provided is a defect inspection method, comprising the steps of: acquiring items of image data of a sample under multiple imaging conditions; storing the items of image data acquired under the multiple imaging conditions into an image storing unit; acquiring a defect candidate(s) from each of the items of image data; cutting out, from the items of image data acquired under at least two imaging conditions and stored in the image storing unit, partial images each including one of the defect candidate positions detected in any of the items of image data and the periphery of the defect candidate position; and integrating the partial images acquired under at least two imaging conditions corresponding to the defect candidates, thereby classifying the defect candidates.