| 摘要 |
<P>PROBLEM TO BE SOLVED: To prevent the transmission of vibration resulting from a refrigerating machine to an entire of a cryostat and a body to be cooled. <P>SOLUTION: A cryogenic cooling device includes: a support stage 50 to which a cold head 18 of the refrigerating machine 10 is fixed, and which supports a load of the cold head; the cryostat 30 which is supported to the ground, connected to the support stage 50 by a bellows 70, and accommodates the body 8 to be cooled, a first-stage cooling stage 21 and a second-stage cooling stage 22 of the cold head 18; a low-vibration stage 42 which is supported to the cryostat 30 via support rods 53, 54, and supports the load of the body 8 to be cooled; and a heat shield 90 which is arranged inside the cryostat 30, whose load is supported to the cryostat 30, and which is connected to the first-stage cooling stage 21, and accommodates the body 8 to be cooled, the second-stage cooling stage 22 and the low-vibration stage 42. <P>COPYRIGHT: (C)2012,JPO&INPIT |
