| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an oxygen partial pressure controlling method capable of reducing an oxygen partial pressure with high operating efficiency over the wide oxygen partial pressure range. <P>SOLUTION: In the oxygen partial pressure controlling method to purify an oxygen-containing gas to an ultra low oxygen pressure gas by an oxygen pump, a plurality of types of oxygen pumps 21a and 21b varied in an electrolytic conduction region are constructed, and the oxygen pump 21a having an electrolytic conduction region in a high oxygen partial pressure range at least is used when an oxygen partial pressure of a purification target gas is high, while the oxygen pump 21b having an electrolytic conduction region in a low oxygen partial pressure range is used when an oxygen partial pressure of the purification target gas is low. <P>COPYRIGHT: (C)2012,JPO&INPIT |
