发明名称 |
SYSTEMS AND METHODS FOR MOVING WEB ETCH, CVD, AND ION IMPLANT |
摘要 |
Systems and methods for moving substrates through process chambers for photovoltaic (PV) or solar cell applications are disclosed. In particular, systems and methods for moving substrates through process chambers using a conveyor belt are disclosed. The conveyor belt can be used to move the substrates through etch chambers, chemical vapor deposition (CVD) chambers, and/or ion implant chambers, and the like. |
申请公布号 |
US2012138230(A1) |
申请公布日期 |
2012.06.07 |
申请号 |
US201113312957 |
申请日期 |
2011.12.06 |
申请人 |
BLUCK TERRY;CHO YOUNG KYU;GRIMARD DENNIS;JANAKIRAMAN KARTHIK;CHUN MOON |
发明人 |
BLUCK TERRY;CHO YOUNG KYU;GRIMARD DENNIS;JANAKIRAMAN KARTHIK;CHUN MOON |
分类号 |
B65G15/48;C23C16/458;C23F1/08;G21K5/10 |
主分类号 |
B65G15/48 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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