METAL-OXIDE-SEMICONDUCTOR FIELD-EFFECT TRANSISTOR (MOSFET) AND METHOD FOR FABRICATING THE SAME

摘要

A method is provided for fabricating a Metal-Oxide-Semiconductor Field-Effect Transistor (MOSFET, 200) on a semiconductor wafer. The method includes providing a substrate containing an epitaxial layer (201), forming a gate oxide layer (203) on a surface of the epitaxial layer (201) by a first oxidization process, forming a polysilicon gate (202) on the gate oxide layer (203) within a gate region, forming a body region (205) in the epitaxial layer (201), forming a source region (204) in the body region (205) of the epitaxial layer (201), and oxidizing the source region (204) to form oxide (207) in a gap between the polysilicon gate (202) and the source region (204) on a surface of the source region (204) by a second oxidization process.