SEMICONDUCTOR MANUFACTURING APPARATUS

摘要

A semiconductor manufacturing apparatus is configured so as to comprise: a frame that forms an outer shell of the semiconductor manufacturing apparatus; a load port disposed at the front of the apparatus in order to exchange a substrate container with the exterior of the semiconductor manufacturing apparatus; a substrate container conveyance mechanism disposed in the frame behind the load port; a substrate container storage shelf disposed in the frame and behind the substrate container conveyance mechanism; a first transparent window that constitutes a portion of the front surface of the frame, that is disposed above the load port, and that has a transparent window; and an operation unit that is disposed at the front of the semiconductor manufacturing system and is operated by an operator.