| 摘要 |
<P>PROBLEM TO BE SOLVED: To quickly and accurately measure the thickness of a translucent tubular object over the whole region. <P>SOLUTION: A measuring laser beam is reflected by a galvano mirror 35, the reflected light beam is applied to a glass tube G, the reflected light beam reflected on the outer peripheral surface of the glass tube G and the reflected light beam reflected on the inner peripheral surface are received by a line sensor 39, and the thickness of the glass tube G is detected from receiving positions of respective reflected light beams. A servo laser beam from a servo laser light source 40 is reflected by the galvano mirror 35 and the reflected light beams is applied to a measuring laser beam irradiation position on the glass tube G or its nearby position from a Z-axis direction. By receiving the reflected light beam of the servo laser beam from the glass tube G by a photodetector 48 and controlling the drive of a motor 36 by a Y-axis direction error signal generation circuit 119, a Y-axis direction servo circuit 120 and a Y-axis direction drive circuit 121, the rotation of the galvano mirror 35 around an X axis is servo-controlled so that the optical axis of the measuring laser beam intersects with a center axis of the glass tube G. <P>COPYRIGHT: (C)2012,JPO&INPIT |
