发明名称 VARIABLE RESISTANCE MEMORY ELEMENT AND FABRICATION METHODS
摘要 An electronic device comprises a variable resistance memory element on a substrate. The variable resistance memory element comprises (i) an amorphous carbon layer comprising a hydrogen content of at least about 30 atomic percent, and a maximum leakage current of less than about 1 x 10-9 amps, and (ii) a pair of electrodes about the amorphous carbon layer. Methods of fabricating this and other devices are also described.
申请公布号 WO2012024544(A3) 申请公布日期 2012.06.07
申请号 WO2011US48328 申请日期 2011.08.18
申请人 APPLIED MATERIALS, INC.;CHENG, SIU F.;PARK, HEUNG LAK;PADHI, DEENESH 发明人 CHENG, SIU F.;PARK, HEUNG LAK;PADHI, DEENESH
分类号 H01L27/115;H01L21/8247;H01L27/10 主分类号 H01L27/115
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