发明名称 Switching device and a method for forming a switching device
摘要 Embodiments provide a switching device. The switching device includes a substrate, which includes a contact region. The switching device further includes a vertical layer arrangement extending from the substrate next to the contact region. The vertical layer arrangement includes a control layer. The switching device further includes a freestanding silicon cantilever extending vertically from the contact region.
申请公布号 US2012138437(A1) 申请公布日期 2012.06.07
申请号 US201113373123 申请日期 2011.11.03
申请人 NG JIAQIANG ELDWIN;TSAI MING LIN JULIUS;SINGH NAVAB;SHEN NANSHENG;AGENCY FOR SCIENCE, TECHNOLOGY AND RESEARCH 发明人 NG JIAQIANG ELDWIN;TSAI MING LIN JULIUS;SINGH NAVAB;SHEN NANSHENG
分类号 H01H59/00;H01L21/00 主分类号 H01H59/00
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