| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a determination method by using a circularity measuring device capable of easily measuring a change in shape of a tip piece. <P>SOLUTION: A tip piece determination method for determining quality of the shape of a spherical tip part of a tip piece in contact with the surface of an object to be measured, the method comprises: placing a reference object to be measured having a known shape on a stage in such a manner that the center of a circular section of the reference object is positioned at the rotation center of the stage (step 101); measuring a noneccentric outer shape of the reference object (step 102); displacing the center of the circular section of the reference object with respect to the rotation center of the stage by a predetermined amount (step 103); measuring an eccentric outer shape of the reference object (step 104); calculating the deformation of the tip piece from a spherical shape based on the difference between the noneccentric outer shape and the eccentric outer shape (step 105); and, when the calculated deformation exceeds a predetermined range (step 106), determining that the tip piece is defective (step 108). <P>COPYRIGHT: (C)2012,JPO&INPIT |
