| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an imaging apparatus having a vibration part which detects a vibration wave efficiently. <P>SOLUTION: The imaging device 1 comprises a vibration part 38 consisting of a part of a first substrate 10, and an imaging part 14 formed at a position on the first main surface 12 of the first substrate 10 different from the vibration part 38. The imaging device 1 further comprises a second substrate 30 which is bonded to the second main surface of the first substrate in a region other than the vibration part. A cavity is formed at a position of the second substrate facing the vibration part. <P>COPYRIGHT: (C)2012,JPO&INPIT |
