| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a thickness measuring method by which the need to parallelism correcting of a probe and a measurement table is eliminated, it is not necessary to use any special probe, a thickness dimension of an object to be measured can be measured highly accurately, and a measuring force can also be adjusted. <P>SOLUTION: A thickness measuring method includes a preparation step of preparing a measuring tool 3 having a tool body 31 having a lower end face 31A2 and an upper end face 31B1 which are parallel to each other and an auxiliary weight 32 which is removably mounted in the tool body 31 and of which the weight can be adjusted, a reference position setting step of placing the lower end face 31A2 on a measurement table 15, abutting a probe 18 to the upper end face 31B1 and setting a moving amount of a spindle 17 at such a time as a reference position, and a measurement step of placing a film 2 on the measurement table 15, then placing the lower end face 31A2 on the film 2, abutting the probe 18 to the upper end face 31B1, and determining a thickness dimension T of the film 2 from a difference between a moving amount of the spindle 17 at such a time and the reference position. <P>COPYRIGHT: (C)2012,JPO&INPIT |
