| 摘要 |
<P>PROBLEM TO BE SOLVED: To enable speedy washing operation with good washing efficiency by reducing the risk of outflow and ignition of solvent vapor, to insert objects to be washed simultaneously by providing a plurality of washing parts and add different washing operations to the objects to be washed while sequentially moving the plurality of washing parts, and to extremely reduce the outflow of the solvent vapor to the outside by making the plurality of washing parts respectively sealable and providing a single entrance/exit to the outside for the objects to be washed. <P>SOLUTION: The device for washing the objects to be washed includes a reference chamber 1 with the entrance/exit 3 sealable by a lid body 2 arranged at the upper end thereof, side chambers 8, 9 arranged in the outer periphery of the reference chamber 1, that can be communicated with or shut off from the reference chamber 1, a vertical carrying mechanism 5 for taking the object 7 to be washed in/out of the reference chamber 1, horizontal carrying mechanisms 11, 12 capable of carrying in the object 7 to be washed in the side chambers 8, 9 or carrying it out to the reference chamber 1, and shutoff walls 26, 27 connected to the horizontal carrying mechanisms 11, 12 and allowing communication or shutoff between the side chambers 8, 9 and the reference chamber 1. <P>COPYRIGHT: (C)2012,JPO&INPIT |
