| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a zinc oxide-based transparent conductive film-forming material usable for a target for film formation of a transparent conductive film which holds conductivity endurable for practical use, has weatherability, and has a suitable etching rate in patterning, a method for manufacturing the same, a target using the same, and a method for forming a zinc oxide-based transparent conductive film. <P>SOLUTION: The zinc oxide-based transparent conductive film-forming material is an oxide sintered compact composed substantially of zinc, molybdenum and oxygen, wherein molybdenum is contained so as to be Mo/(Zn+Mo)=≥0.02 but ≤0.1 in atomic ratio. <P>COPYRIGHT: (C)2012,JPO&INPIT |
