| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a zinc oxide-based transparent conductive film-forming material usable for a target for film formation of a transparent conductive film which holds conductivity endurable for pracrtical use, has weather resistance, and has a suitable etching rate in patterning, a method for manufacturing the same, a target using the same, and a method for forming zinc oxide-based transparent conductive film. <P>SOLUTION: The zinc oxide-based transparent conductive film-forming material is an oxide sintered compact composed substantially of zinc, niobium and/or tantalum and oxygen, wherein niobium and/or tantalum is contained so as to be X/(Zn+X)=≥0.02 but ≤0.1 in atomic ratio (in the expression, X is niobium and/or tantalum). <P>COPYRIGHT: (C)2012,JPO&INPIT |
