| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a gas discharge apparatus capable of suppressing generation of a chemical synthetic composition containing a harmful substance such as a tar-like material in an exhaust part at low cost. <P>SOLUTION: A gas discharge apparatus discharges a gas in a heating chamber 13 for forming a carbon nanotube by a vacuum pump 36. A cylindrical body 31 having a decompression chamber which is decompressed at a lower pressure than the heating chamber 13 is disposed in an exhaust gas route between the heating chamber 13 and the vacuum pump 36. At the same time, a cooler 34 is disposed at its downstream side. <P>COPYRIGHT: (C)2012,JPO&INPIT |
