X-RAY SENSOR, INSPECTION METHOD OF X-RAY SENSOR, AND X-RAY DIAGNOSTIC DEVICE USING X-RAY SENSOR

摘要

PROBLEM TO BE SOLVED: To provide an X-ray sensor in which occurrence of a white scratch can be limited even when a scratch or uneven film thickness occurs in a hole injection blocking layer or the like.

SOLUTION: The X-ray sensor comprises a translucent substrate 17, a translucent electrode 21 formed on one surface of the translucent substrate 17, and a photoconductive film 18 including a hole injection blocking layer 22, an electric field relaxation layer 23, a hole trap layer 24, a photoconductive sensibility layer 25 having a charge multiplication function, and an electron injection blocking layer 26 provided sequentially on one surface of the translucent substrate 17 where the translucent electrode 21 is formed. The electric field relaxation layer 23 is thicker than a layer consisting of the translucent electrode 21 and the hole injection blocking layer 22.

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