| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a microscan system that obtains a 2D image by a one-dimensional scan method. <P>SOLUTION: The microscan system comprises a microscope 12 that is suitable for magnifying an image of an object to be inspected 14, a relay lens device 18 that is suitable for receiving and transferring a magnified image 19a output by the microscope 12 and provided after the microscope, a step motor 24 that is suitable for reciprocating the relay lens device 18 stepwisely along a second direction and linearly in a first direction and electrically connected to the relay lens device 18, and a hyper-spectrometer that receives a part of the magnified image 19a of the object to be inspected 14 in the first direction transferred sequentially along the second direction by the relay lens device 18, is suitable for converting the part of the magnified image to corresponding spectrum information, and is provided after the relay lens device 18. <P>COPYRIGHT: (C)2012,JPO&INPIT |
