PROCESSING ASSEMBLY FOR SEMICONDUCTOR WORKPIECE AND MEHTODS OF PROCESSING SAME
摘要
A processing assembly for a semiconductor workpiece generally includes a rotor assembly capable of spinning a workpiece, a chemistry delivery assembly for delivering chemistry to the workpiece, and a chemistry collection assembly for collecting spent chemistry from the workpiece. The chemistry collection assembly may include a weir that is configured to spin with the rotor assembly. A method of processing a semiconductor workpiece is also provided.
申请公布号
WO2012075438(A2)
申请公布日期
2012.06.07
申请号
WO2011US63145
申请日期
2011.12.02
申请人
APPLIED MATERIALS, INC.;RYE, JASON;HANSON, KYLE, M.