stage with flexure joint for compensation of yaw error

摘要

PURPOSE: A stage for compensating a rotational error using a flexible mechanism is provided to effectively compensate a rotational error without an additional drive system. CONSTITUTION: A stage for compensating a rotational error using a flexible mechanism comprises flexible units(200). The flexible units are installed on both ends of a gantry stage and are connected to Y-axis sliders(100,110). Each flexible unit comprises a body and a rotation unit. The rotation units are connected to the bodies through multiple leaf springs. The length and quantity of the leaf springs can be controlled.