Ultrashort pulse laser and water cutting device and method using coagulation

摘要

PURPOSE: A cutting device and method using ultra-short pulse laser and water freezing are provided to prevent the residue on a work piece by forming a void on the underside of the work piece using ultra-short pulse laser and reduce cut scraps by using stress generated from the freezing of water in the void. CONSTITUTION: A cutting device using ultra-short pulse laser and water freezing comprises a laser source, a base plate(104), a vapor supply unit(108), and a cooling gas supply unit(109). The laser source condenses a laser(100) through a condensing lens(110) to a work piece(102) and outputs ultra-short pulse laser to form a void(103) in the work piece. The base plate comprises a vapor supply part(106) and a cooling gas supply part(107) on both sides thereof. The cooling gas supply unit supplies cooling gas to the cooling gas supply part. A crack is generated in the work piece by the laser of the laser source. Vapor and cooling gas are successively supplied and the work piece is cut by expansion resulting from the freezing of vapor.