APPARATUS FOR MANUFACTURING POLYSILICON BASED ELECTRON-BEAM MELTING USING DUMMY BAR AND METHOD OF MANUFACTURING POLYSILICON USING THE SAME

摘要

PURPOSE: A poly-silicon manufacturing device and method of electronic beam melting base are provided to maximize elimination efficiency of metallic impurities by applying a dummy bar when unidirectionally coagulating molten silicon. CONSTITUTION: The inside of a vacuum chamber(110) is maintained under high-vacuum atmosphere. A first electron gun(120a) and a second electron gun(120b) radiate electron beam in the inner side of the vacuum chamber. A silicon melting unit(130) is arranged is arranged in a first electron beam radiation area. A one-way solidification unit(140) is arranged in a second first electron beam radiation area. The one-way solidification unit comprises a start block(145) transferring molten silicon to a down direction.